P5000
AMAT
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產(chǎn)品描述
Manufacturer : AMAT
Type: Etcher
Model: P5000
技術(shù)支持
? Applied Materials (AMAT) P5000 Oxide etcher
? 21 slot VME (Mark II mainframe)
? 200mm wafers
? 3 process chambers
o ESC (Electro-Static-Chuck)
o Turbo pumped
o Unibody chambers (Mxp)
o Current configuration is non-gate valve, but this can be added
? System is complete with cables, heat exchanger, vacuum pumps, mini controller, RF generators, and AC panel
